Senior Algorithm Engineer Huaqing Liu:Introduction of Semiconductor Measuring Equipment Technology
Academy of Mathematics and Systems Science, CAS
Colloquia & Seminars |
| Speaker: |
Senior Algorithm Engineer Huaqing Liu, Huawei 2012 Lab |
| Inviter: |
Associate Professor Wei Leng |
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Title: |
Introduction of Semiconductor Measuring Equipment Technology |
| Language: |
Chinese |
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Time & Venue: |
2023.04.20 10:30-11:30 N212 |
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Abstract: |
本报告结合个人在半导体量测设备技术行业的工作经历，简要介绍半导体领域的技术，主要包括芯片制造工艺流程，光学量测技术OCD，器件几何建模，光学仿真算法RCWA和明暗场检测设备图像处理集群。 |
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